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High Pressure Process
Qulee with YTP-H Series ( For Vacuum )
Qulee with YTP-H For Vacuum (1, 10, 100, 500, 3000Pa)
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A variation of Qulee, adding new features in response to customer needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.
Features
- Excellent Cost Performance
Provides gas analysis with an optional differentialpumping unit - Compact Design
Utilizes standard vacuum unit model desktop YTP - Integrated Display Unit Design
Provides visual data without need for a PC - Easy to Operate
One-click function for easy operation, no complex procedures - Atmospheric Pressure Analysis
Selectable maximum measurable pressures 3000Pa,500Pa,100Pa, 10Pa and 1Pa
(22.5Torr, 3.75Torr, 0.75Torr, 7.5×10-2Torr and 7.5×10-3Torr / 30mbar, 5mbar, 1mbar, 0.1mbar and 1.0×10-2mbar) - Select a Model Depending on your Application
Select from the mass numbers 1 to 100 (BGM2-101 / 102), 1 to 200(BGM2-201 / 202), 1 to 300(HGM2-302) - Low noise
43dB(A) or less at Ultimate pressure - Pressure indication
Designed for easy integration of 2 vacuum gauges - Complete Leak Test Function
Helium leak test, air leak test, leak up test - Qulee QCS Ver.4 (Ethernet compatible)
Software included (Windows 8/10/11)
Applications
- Various types of gas analysis for research and development
- Gas monitoring of PVD system during processing
Residual gas analysis in PVD system - Residual gas analysis for high vacuum pumping equipment, etc.
Specifications
| Qulee main body | Select from BGM2-101 / 102 / 201 / 202, HGM2-302 ＊Refer to the product catalogue for the specification of Qulee |
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| Software Qulee QCS Ver. 4.2 later (Windows 8/10/11) | |||
| Max sampling pressure | 3000Pa / 500Pa / 100Pa / 10Pa / 1Pa | ||
| 22.5Torr / 3.75Torr / 0.75Torr / 7.5×10-2Torr / 7.5×10-3Torr | |||
| 30mbar / 5mbar / 1mbar / 0.1mbar / 1.0×10-2mbar | |||
| ＊Atmospheric pressure type can be used only under the atomospheric condition ＊3000 to 1Pa (22.5 to 7.5×10-3Torr,30 to 0.01mbar) types can be used under each pressure |
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| Vacuum type | Gas introduction type (3000Pa ～1Pa type) |
Manual bellows valve (2 systems: orifice line / direct line) Mating flange / ICF070 |
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| Variable leak valve type | Sampling pressure | Power-supply voltage | AC100-240V |
| Pump unit desktop YTP | Desktop YTP (YTP70A-D) |
Turbo molecular pump | 70L/s (N2) |
| Dry pump(Roughing) | 19L/min(Diaphragm pump) | ||
| Power-supply voltage | AC100-240V | ||
| Accessories | AC100V power cord(*1), Base stage for DesktopYTP(*2), AC adapter for Qulee, LAN cable(3m) for Qulee, Software installation disc, Bolt set for fixing flange, Gasket (ICF114G,ICF070G), Various fixing screws | ||
| Options | Ionization gauge package(SH200-1,Sensor head cable 2m, Cross tube, Bolts,Gaskets), USB-LAN adapter, Switching hub(8 ports or 16 ports)(*3),Floor cart(*4) | ||
＊1 Please use power code when using the device in a foreign country or a region where the electrical voltage differs from AC100V.
＊2 Make sure to use a base stage when installing desktop YTP.
＊3 AC adapter is necessary for an optional switching hub.
＊4 Please set up the floor cart by yourself.
